KLA Tencor D-600 Stylus Profiler

The Alpha-Step D-600 provides rapid, high resolution 2D and 3D profiling of a sample surface with a vertical range of 1200 micrometers and sub-Angstrom resolution. The instrument has a high resolution camera for visualising the sample, and a 200 mm motorised stage with a range of motion of 150 x 178 mm. The data is particularly useful for calibrating depth profiles performed on the XPS or TOFSIMS.

The profiler available for use at no charge, and is located in F10:G61. Contact Outi Mustonen (outi.mustonen@unsw.edu.au) for training and access.